| 公司为范围广泛的工业领域提供标准产品和承接定制系统工程。公司的员工多是材料科学研发、系统设计、真空技术和工业自动化领域的高级技术专家。他们为薄膜及厚膜的应用提供各种各样从定制的真空涂覆系统到高度的自动化生产线。 |
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| System |
|
| Plasma
Enhanced CVD |
|
| Etch
(RIE) |
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| Plasma
Polymerization |
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| Cluster
Tools (Wafer to 300 mm) |
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| Hot
Wire CVD |
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| Electron
Beam |
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| Evaporation |
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| MBE |
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| MOCVD
(Development) |
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| Sputtering |
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| Atmospheric
CVD (Development) |
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| Low
Pressure CVD |
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| Hybrid
Systems |
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| Air
to Air Vacuum Processes |
|
| Space
Simulation |
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| Combination
Process |
|
| Laser
Scribing |
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| Control
System |
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| |
|
| Peripheral
Systems |
|
| RF
Plasma accessories |
|
| Load
/ Unload Handling Stations |
|
| Substrate
Storage and Handling |
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| Substrate
Cleaning Stations |
|
| Automatic
He Leak Detector Systems |
|
| Substrate
Testing (Mechanical Process) |
|
| Electrical
and Electronic Sub-Systems |
|
| Supply
Spare Parts and Subsystem |
|
| Automatic
Bake Out / Seam Seal |
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